This course aims to provide a general understanding of semiconductor process. This course explores the principles and basic theory of semiconductor device and process. Furthermore, the students will learn the overall semiconductor process such as oxidation, diffusion, ion implantation, lithography, etching, thin film deposition, plasma, metallization, and packaging.
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The lecture notes can be downloaded with registration, that helps students watch the videos. There are quiz problems to check your understanding of the lectures. To receive course certificate., you must score at least 60% of quiz within two chances.
Lecture notes, quiz and certificate are offered to registered students only.
Introduction to Semiconductor Process 2
Week 1 Wet & Dry Etch (1)
Week 2 Wet & Dry Etch (2)
Week 3 Thin Film Deposition (1)
Week 4 Thin Film Deposition (2)
Week 5 Metallization Chemical Mechanical Polishing Strain Engineering
Week 6 Electronic Packaging (1)
Week 7 Electronic Packaging (2)
Week 8 3D Transistor Process
What you'll learn
Learn about modern semiconductor process
Syllabus
Week 1 Overview of MOSFET theory
Week 2 CMOS Process Integration
Week 3 Cleanroom, RCA Cleaning Crystal Growth
Week 4 Diffusion & Doping
Week 5 Oxidation
Week 6 Ion Implantation
Week 7 Lithography
Week 8 EUV Lithography
